Abstract
W/C multilayers had been investigated by many research workers[1,5]. Reported here is our preliminary results of deposition and characterization of W/C multilayer mirror for 4.47nm x-ray.
© 1994 Optical Society of America
PDF ArticleMore Like This
Charles M. Falco, Brian S. Medower, and J. M. Slaughter
ThA.5 Physics of X-Ray Multilayer Structures (PXRAYMS) 1994
Fan Zhengxiu
PD5 Soft X-Ray Projection Lithography (SXRAY) 1992
S. Abdali, F.E. Christensen, K.D. Joensen, K. Mogensen, L. Gerward, and J. Garnæs
MC.7 Physics of X-Ray Multilayer Structures (PXRAYMS) 1994