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A multiwavelength angle-resolved scatterometer or how to extend the optical window

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Light scattering constitutes a powerful tool to characterize surface roughness at the scale of optical frequencies. Many results have been published [1] and show that the measured roughness spectrum is an intrinsic property of the surfaces. This valids both the accuracy of the scatterometer and the validity of the electromagnetic theory.

© 1992 Optical Society of America

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