Abstract

We have previously described a new noncontacting profilometer with Angstrom-level precision and accuracy^1,2,3. We have used this instrument to measure a variety of profiles, from diametral scans of steep aspheres to axial and circumferential scans of cylindrical elements. Here we review the theory of operation, show some relevant measurement results, and discuss the upgrades underway that will make the instrument particularly well suited to the exotic mirrors needed for soft X-ray lithography.

© 1991 Optical Society of America