Abstract
Recent analyses of critical system issues in Soft X-ray Projection Lithography are discussed. An overall system design provides detailed requirements (specifications) for x-ray mirror reflectivity, source power and parameters, resist sensitivity, etc. A cost analysis for SXPL systems leads to important requirements for x-ray mirror technology. An analysis of power loading limitations on precision SXPL imaging optics has important implications for source power and x-ray mirror reflectivity requirements.
© 1991 Optical Society of America
PDF ArticleMore Like This
N. M. Ceglio, A. M. Hawryluk, D. G. Stearns, D. P. Gaines, R. Rosen, and S. Vernon
WD1 Short Wavelength Coherent Radiation: Generation and Applications (HFSW) 1991
Andrew M. Hawryluk
FC2 Soft X-Ray Projection Lithography (SXRAY) 1991
J. E. Bjorkholm, R. D'Souza, L. Eichner, R. R. Freeman, T. E. Jewell, A. A. MacDowell, W. M. Mansfield, J. Pastalan, L. H. Szeto, D. Taylor, D. M. Tennant, W. K. Waskiewicz, D. L. White, D. L. Windt, and O. R. Wood
FB2 OSA Annual Meeting (FIO) 1991