Abstract

Micrascan-92 is a 248 nm, 0.5 NA, 4X step and Scan lithography tool designed for 0.35 micron manufacturing. It is capable of printing 22x32.5 mm field on 8" wafers with 50 W/hr throughput with the required overlay on the critical process levels. The optical projection lithography technology used in MS-92 is compatible with I-Line, DUV, and VDUV exposures. The step and scan technology, on the other hand, is extendible to meet the requirements of projection X-Ray applications.

© 1992 Optical Society of America