Calibration and Metrology of X-Ray Optics at the Center for X-ray Optics

E. M. Gullikson; J. H. Underwood

doi:10.1364/SXRAY.1993.TuD.17

Soft X-Ray Projection Lithography
Technical Digest Series (Optica Publishing Group, 1993),
paper TuD.17
•https://doi.org/10.1364/SXRAY.1993.TuD.17

Calibration and Metrology of X-Ray Optics at the Center for X-ray Optics

E. M. Gullikson and J. H. Underwood

Soft X-Ray Projection Lithography 1993

California United States
10–12 May 1993
ISBN:

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Poster Session I (TuD)

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E. M. Gullikson and J. H. Underwood, "Calibration and Metrology of X-Ray Optics at the Center for X-ray Optics," in Soft X-Ray Projection Lithography, Technical Digest Series (Optica Publishing Group, 1993), paper TuD.17.

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Abstract

In the last 20 years x-ray optics has become an important branch of optics which is having more and more impact in a variety of scientific and technological areas. These activities require accurate and reliable calibration and standards facilities to enable scientists and engineers to measure the performance of optical elements and predict the performance of a system.

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