Soft-x-ray projection lithography using two arrays of phase zone plates

Scott D. Hector; Henry I. Smith

doi:10.1364/SXRAY.1993.WC.1

Soft X-Ray Projection Lithography
Technical Digest Series (Optica Publishing Group, 1993),
paper WC.1
•https://doi.org/10.1364/SXRAY.1993.WC.1

Soft-x-ray projection lithography using two arrays of phase zone plates

Scott D. Hector and Henry I. Smith

Soft X-Ray Projection Lithography 1993

California United States
10–12 May 1993
ISBN:

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Alternate Strategies (WC)

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S. D. Hector and H. I. Smith, "Soft-x-ray projection lithography using two arrays of phase zone plates," in Soft X-Ray Projection Lithography, Technical Digest Series (Optica Publishing Group, 1993), paper WC.1.

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Abstract

At feature sizes below 70nm, the mask-to-sample gap in proximity x-ray lithography must be less than 5μm, which, although this is not a problem in research, it may be undesirable in manufacturing. Thus, for sub-70nm features, one is persuaded to consider the feasibility of x-ray projection systems.

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