Abstract

Characterization of thin-film surface has been the subject of numerous accounts. The good quality optical surface can be characterized with various methods. However, it is defficult to compare the statistical parameters of surfaces measured by different techniques. The measured value depends on the bandwidth of surface spatial frequency limit of the instrument used. In this study we have used the differential scattering (DS) as well as the digital analysis of micrographs of surface replicas (DAM) for characterizing the smooth surfaces of Ag and Al films. The experimental results showed that the combination of these two techniques could measure the statistical properties of optical surfaces over an extended bandwidth of surface spatial wavelength limit from 35 Å to 60 μm.

© 1988 Optical Society of America