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Conferences > OIC > 2022 > WC > WC.4

Improving Particle Performance in Plasma Enhanced Magnetron Sputtering

S. Schwyn Thöny, M. Bärtschi, St. Waldner, and Th. Frei

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Abstract

Particle performance of optical coatings is gaining increasing importance. This paper will show how the particle performance of magnetron sputtered coatings can be characterized and how the particle performance could strongly be improved based on these findings.

© 2022 The Author(s)

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