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Conferences > SXRAY > 1991 > ThA > ThA1

Source Issues Relevant to X-Ray Lithography

Khanh Nguyen and David Attwood

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Abstract

Synchrotrons and laser-produced plasmas (LPPs) are leading candidates for radiation sources for x-ray lithographic systems. Each has its own strengths and weaknesses. Synchrotrons offer higher flux and brightness but are large and expensive. Laser-produced plasmas sources may be cheaper and smaller but have low average power and non-directional output.

© 1991 Optical Society of America

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