Condenser Optics for Soft X-ray Projection Lithography

Steve Vernon; Gary Sommargren; Lynn Seppala; David Gaines

doi:10.1364/SXRAY.1993.MB.2

Soft X-Ray Projection Lithography
Technical Digest Series (Optica Publishing Group, 1993),
paper MB.2
•https://doi.org/10.1364/SXRAY.1993.MB.2

Condenser Optics for Soft X-ray Projection Lithography

Steve Vernon, Gary Sommargren, Lynn Seppala, and David Gaines

Soft X-Ray Projection Lithography 1993

California United States
10–12 May 1993
ISBN:

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S. Vernon, G. Sommargren, L. Seppala, and D. Gaines, "Condenser Optics for Soft X-ray Projection Lithography," in Soft X-Ray Projection Lithography, Technical Digest Series (Optica Publishing Group, 1993), paper MB.2.

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Abstract

Condenser optics has been designed, fabricated and coated for use in a "front-end" test bed facility at LLNL. Details of condenser design and coating processes will be discussed.

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