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  • Applications of Diamond Films and Related Materials: Third International Conference
  • Technical Digest Series (Optica Publishing Group, 1995),
  • paper DP283

Laser Processing of Diamond Substrates for Multichip Modules: Part II

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Abstract

The development of new techniques for post-synthesis processing such as polishing and metallization is of intense current interest due to the potential use of diamond as an MCM thermal management substrate. In our laboratory, we have been able to demonstrate chemically clean laser induced coarse polishing and selective laser- assisted metal deposition on diamond substrates. Our technique is based on the use of a liquid ambient as a reactive medium for the laser processing of diamond substrates.

© 1995 Optical Society of America

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