Simulation of Soft-X-Ray Images from a 1:1 Ring-Field Optic

O. R. Wood; R. M. D'Souza; M. Himel; J. E. Bjorkholm; K. Early; L. A. Fetter; R. R. Freeman; L. H. Szeto; D. E. Tennant; D. W. Taylor; T. E. Jewell; D. Lee; A. R. Neureuther; D. M. Newmark; A. A. MacDowell; L. Eichner; W. K. Waskiewicz; D. L. White; D. L. Windt; D. M. Williamson; F. Zernike

doi:10.1364/SXRAY.1993.MA.2

Soft X-Ray Projection Lithography
Technical Digest Series (Optica Publishing Group, 1993),
paper MA.2
•https://doi.org/10.1364/SXRAY.1993.MA.2

Simulation of Soft-X-Ray Images from a 1:1 Ring-Field Optic

O. R. Wood, R. M. D'Souza, M. Himel, J. E. Bjorkholm, K. Early, L. A. Fetter, R. R. Freeman, L. H. Szeto, D. E. Tennant, D. W. Taylor, T. E. Jewell, D. Lee, A. R. Neureuther, D. M. Newmark, A. A. MacDowell, L. Eichner, W. K. Waskiewicz, D. L. White, D. L. Windt, D. M. Williamson, and F. Zernike

Soft X-Ray Projection Lithography 1993

California United States
10–12 May 1993
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O. R. Wood, R. M. D'Souza, M. Himel, J. E. Bjorkholm, K. Early, L. A. Fetter, R. R. Freeman, L. H. Szeto, D. E. Tennant, D. W. Taylor, T. E. Jewell, D. Lee, A. R. Neureuther, D. M. Newmark, A. A. MacDowell, L. Eichner, W. K. Waskiewicz, D. L. White, D. L. Windt, D. M. Williamson, and F. Zernike, "Simulation of Soft-X-Ray Images from a 1:1 Ring-Field Optic," in Soft X-Ray Projection Lithography, Technical Digest Series (Optica Publishing Group, 1993), paper MA.2.

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Abstract

Using a recently extended version of the two-dimensional aerial image simulator, SPLAT 1 , we show that annular illumination of a soft-x-ray 1:1 ring-field camera at 13 nm increases image contrast for features with spatial frequencies immediately above the coherent cutoff and that surface figure errors are responsible for the asymmetric, spatially-shifted images that have been observed experimentally.

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